Plasma Cleaning Technology

Only available in Germany, Austria, Switzerland and Benelux.

IBSS provides SEM, FIB and TEM plasma cleaning solutions. IBSS’s flagship, the GV10x DS Asher, is a new paradigm in situ downstream plasma ashing. Competitively priced, the GV10x Downstream Asher reduces carbon & hydrocarbon contamination 10 to 20 times more effectively than traditional methods at vacuum pressure safe for TMP operation. Furthermore, IBSS’s product range includes:

GV10x DS Asher

The GV10x Downstream Asher’s ability to remove carbon contamination is a major advancement over traditional methods of mitigating contamination using cold trapping, nitrogen purging, and other plasma cleaners. The GV10x, with its extended power and pressure range (5 to 100 Watts and 250 to <0.7 Pa), represents a paradigm shift in the carbon decontamination of SEMs and other vacuum systems. Atomic oxygen and hydrogen eliminates contamination by converting the surface carbon into gas phase molecules which are then pumped out of chambers.

GV10x UHV DS Asher

The GV10x UHV DS Asher is designed to reside on a UHV chamber after chamber plasma cleaning in millitorr range without breaking vacuum. This one of a kind in-situ plasma source eliminates the need for a costly isolation valve and pre-pump. Through an innovative plasma source design, the GV10x UHV Downstream Asher reduces hydrocarbon contamination 10 to 20 times more effectively on synchrotron optics and >10 times faster than traditional methods and plasma cleaners.

MCA - Mobile Cubic Asher

A mobile plasma center that cleans, stores and processes SEM/TEM samples/holders and other items in a small chamber. The MCA chamber accommodates an assortment of specimens to remove hydrocarbons, hydrophilizing surfaces, storing and cleaning three TEM holders and specimens with the GV10x Downstream plasma fitted onto a portable cart.
The plasma unit can be detached and simply fastened through “Qwk-Switch” connector to a free SEM port within minutes for in-situ plasma cleaning (2-in-1 feature).

Chiaro

Similar to MCA but distinguished by turbomolecular pressure & speed. An optional optical microscope can be installed to mount and observe specimens during plasma conditioning and potential leak observation from liquid/gas specimen cells.

MCA Plasma Storage Expansion 3

MCA chamber capabilities can be expanded to accommodate up to 9 TEM holders with the addition of the Storage Expansion 3 option. This storage expansion for MCA leverages the powerful capabilities and flexibility of the MCA.

SPex TEM Holder Sleeve for MCA Plasma Cleaner

SPex TEM Holder Sleeve expands the MCA’s capabilities to accommodate TEM holder functionality. SPex for MCA leverages the powerful capabilities and flexibility of the MCA plasma cleaning station.

Interested in a product demo?

Would you like to learn more about the IBSS plasma cleaning solutions, or see it in action yourself? We would be happy to arrange a personal demonstration. Or contact us to discuss the solutions IBSS can provide for your lab.